Abstract
Recently, the memory effect was observed in Er stabilized β-MnO2 metal oxide semiconductor structure. In this work, the electric properties and mechanism of charge tunneling and trapping are studied by combining frequency-dependent capacitance-voltage curves, variable sweep range capacitance-voltage curves, and current-voltage curves. The charge traps are identified to be deep donors in β-MnO2. The deep donor level is close to the valance band, which results in the asymmetric enlargement in variable sweep range capacitance-voltage curves. Resonant tunneling and Fowler-Nordheim tunneling mechanisms are observed at low and high voltages, respectively. All these phenomena can be explained by the proposed model as a whole. The experimental evidence shows that Er-stabilized β-MnO2 is a good candidate charge storage material in nonvolatile memory devices.
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