Abstract
The charge state distribution of multiply charged Ar ions in an electron cyclotron resonance (ECR) heated microwave discharge (Bernhardi et al. 1976) was measured by means of VUV-spectroscopy in the wavelength region λ ≤ 100 nm (Marlinghaus 1984). Ion densities were computed from absolute line intensities in a modified corona model. Assuming electron impact excitation of groundstate ions to play the major role and neglecting all other processes leading to excitation, the ion density nz is given by
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