Charge Instability in MIS Structures on Silicon with PECVD Boron Nitride Thin Films

Abstract

physica status solidi (a)Volume 133, Issue 2 p. K57-K60 Short Note Charge Instability in MIS Structures on Silicon with PECVD Boron Nitride Thin Films A. N. Korshunov, A. N. Korshunov Institute of Inorganic Chemistry, Russian Academy of Sciences, Siberian Branch, Novosibirsk Search for more papers by this authorM. L. Kosinova, M. L. Kosinova Institute of Inorganic Chemistry, Russian Academy of Sciences, Siberian Branch, Novosibirsk Search for more papers by this authorE. G. Salman, E. G. Salman Institute of Inorganic Chemistry, Russian Academy of Sciences, Siberian Branch, Novosibirsk Search for more papers by this authorYu. M. Rumyantsev, Yu. M. Rumyantsev Institute of Inorganic Chemistry, Russian Academy of Sciences, Siberian Branch, Novosibirsk Search for more papers by this authorN. I. Fainer, N. I. Fainer Institute of Inorganic Chemistry, Russian Academy of Sciences, Siberian Branch, Novosibirsk Search for more papers by this authorN. P. Sysoeva, N. P. Sysoeva Institute of Inorganic Chemistry, Russian Academy of Sciences, Siberian Branch, Novosibirsk Search for more papers by this authorZ. L. Akkerman, Z. L. Akkerman Institute of Inorganic Chemistry, Russian Academy of Sciences, Siberian Branch, Novosibirsk Search for more papers by this author A. N. Korshunov, A. N. Korshunov Institute of Inorganic Chemistry, Russian Academy of Sciences, Siberian Branch, Novosibirsk Search for more papers by this authorM. L. Kosinova, M. L. Kosinova Institute of Inorganic Chemistry, Russian Academy of Sciences, Siberian Branch, Novosibirsk Search for more papers by this authorE. G. Salman, E. G. Salman Institute of Inorganic Chemistry, Russian Academy of Sciences, Siberian Branch, Novosibirsk Search for more papers by this authorYu. M. Rumyantsev, Yu. M. Rumyantsev Institute of Inorganic Chemistry, Russian Academy of Sciences, Siberian Branch, Novosibirsk Search for more papers by this authorN. I. Fainer, N. I. Fainer Institute of Inorganic Chemistry, Russian Academy of Sciences, Siberian Branch, Novosibirsk Search for more papers by this authorN. P. Sysoeva, N. P. Sysoeva Institute of Inorganic Chemistry, Russian Academy of Sciences, Siberian Branch, Novosibirsk Search for more papers by this authorZ. L. Akkerman, Z. L. Akkerman Institute of Inorganic Chemistry, Russian Academy of Sciences, Siberian Branch, Novosibirsk Search for more papers by this author First published: 16 October 1992 https://doi.org/10.1002/pssa.2211330244Citations: 7 630090 Novosibirsk, Russia. AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onFacebookTwitterLinkedInRedditWechat Citing Literature Volume133, Issue216 October 1992Pages K57-K60 RelatedInformation