Abstract

In this paper we present results on charge exchange of He+ ions at a polycrystalline Cu surface. Monte Carlo simulations were used to calculate the trajectories of projectiles scattered by an angle Θ=136°. By including Auger neutralization and charge exchange in close collisions, energy spectra of the scattered ions as well as ion fraction values were calculated for primary energies in the range 0.5–5keV and compared to experimental results. In the simulations, the Auger neutralization rate Γ and the probabilities of resonant neutralization (PRN) and reionization (PRI) are treated as free parameters. Using well accepted values from literature for these quantities very good agreement between simulations and experimental data was achieved.

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