Abstract
A charge compensation technique has been developed for secondary ion mass spectrometry and imaging of insulating samples as large as 1 cm 2 using a triple quadrupole-based microprobe. The microprobe secondary ion extraction field is synchronized with a periodic primary Cs + beam to allow a sheetlike beam of 5-eV electrons to pass over the sample surface when the extraction field is zeroed. Electrons are attracted to, and neutralize, any points on the sample that have accumulated positive charge. Positive secondary ion images from Teflon®, a well-known insulator, illustrate the effectiveness of charge compensation. Locating and identifying analytes on dry filter paper by using tandem mass spectrometry are also demonstrated.
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