Abstract
Using Geant4 Monte Carlo code and Technology Computer-Aided Design (TCAD) simulation, energy deposition and charge collection of single event effects (SEE) are studied, which are induced by low-energy protons and α particles in small feature size devices. We analyzed charge collection of SEE especially at Bragg’s peak and obtained two types of deposited energy distributions of protons and α particles at different incident energies. The two components of the total charge collected are quantified, which are due to drift current of the space charge region and current in the funnel region separately. Results explain the high soft error rate in experiments of low energy proton.
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