Abstract
Micro Electromechanical Systems (MEMS) switches offer many advantages over conventional larger switches. One potential application we are exploring is the use of commercial radio frequency (RF) MEMS switches for quantum computing applications. However, it is well-documented that cryogenic temperatures can cause mechanical reliability issues for MEMS. Furthermore, commercial RF MEMS switches are designed for room temperature operation, thus their reliability at cryogenic temperatures is unknown. Commercial MEMS switches are also packaged inside sealed housings, which prevent the use of optical methods for characterization and inspection. We are therefore developing test methods to evaluate the reliability of commercial RF MEMS switches at cryogenic temperatures. We describe our test methods and preliminary reliability test data from room temperature down to 55 K.
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