Abstract
Large-area and uniformly distributed 3-aminopropyltriethoxysilane (γ-APTES) incorporated with poly-dimethylsiloxane-treated hydrophobic fumed silica nanoparticles (NPs) sensing membranes with different mixed ratios were deposited by using ultrasonic liquid atomizer (ULA) spray. Nanoscale current–voltage (I–V) characteristics of the deposited membranes were then characterized by using conductive atomic force microscopy. It is found that the ULA-sprayed γ-APTES plus NPs (γ-APTES + NPs) membrane has smaller leakage current and higher breakdown voltage than does the ULA-sprayed pure γ-APTES membrane. Excellent glucose sensing performances are found when using the deposited ULA-sprayed γ-APTES + NPs as sensing membrane on polysilicon wire sensor. Further sensing performance enhancement was obtained as the γ-APTES + NPs membrane was subjected to UV illumination. Our experiment’s results confirmed that the ULA spray is a promising method for large area deposition of γ-APTES + NPs membrane and that it can be utilized for biomedical sensor applications.
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