Abstract
Superconducting YBa 2Cu 3O 7 thin films have been deposited by high pressure oxygen sputtering technique (HOST). The epitaxial films prepared on MgO substrates have been analysed using Rutherford Backscattering Spectroscopy (RBS) and Auger Electron Spectroscopy (AES). The films are found to be stoichiometric and homogeneous. Thickness uniformity and surface roughness of these films have also been analysed. The possible sputter mechanism in this method has been discussed.
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