Abstract
The quarter-wavelength (/spl lambda//4) acoustic matching layer is a vital component in medical ultrasonic transducers, which can bridge the large acoustic impedance mismatch between the piezoelectric material and the human body. At high frequencies (>50MHz), the /spl lambda//4 matching layers become extremely thin and the characterization of its properties becomes very challenging. We report a novel method to measure the phase velocity and attenuation of ultra-thin layers using the /spl lambda//4 matching principle. The method has been successfully used to measure a 14.6 /spl mu/m Epo-Tek 301 epoxy film on glass substrate and a 9.5 /spl mu/m sol-gel silicon oxide colloidal/polymer composite film on Si substrate.
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