Abstract
A zone plate for hard X-rays with outermost zone width as small as 30 nm and thickness ∼14 μm fabricated by sputtered-sliced technology was evaluated. With the brilliant X-ray beam from the undulator at the SPring-8 the minimum focal spot size attained was ∼0.8 μm at the energy of 18.6 keV. The intrinsic diffraction efficiency was determined to be ∼12%.
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