Abstract
In order to understand the fundamental mechanisms in a radio-frequency magnetron sputtering system, the main properties of the argon plasma used in the process have been measured. A complete three-dimensional map of the ion density, electron temperature, and plasma potential has been obtained using a Langmuir probe. The electron temperature as well as the ion density have been found to increase in the region of the so called race track at the cathode. Furthermore, from the plasma potential map, the time-averaged local electric field has been obtained, pointing out the race track as the region where the most intense ion bombardment takes place. Besides, only the ions produced near the race track are accelerated towards the cathode, whereas those produced in the remaining volume move towards the anode. Finally, the dependence of the plasma quantities on the incident radio-frequency power and deposition pressure has been studied. The plasma potential measured using the Langmuir probe has been found to agree with that determined using an energy resolved mass spectrometer in all studied conditions.
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