Abstract
In this study presents a hybrid numerical scheme comprising the differential transformation method and the finite difference approximation technique to analyze the nonlinear dynamic response of the micro circular plate. The analysis takes account of the axial residual stress and hydrostatic pressure acting on micro circular plate upper surface. The effects of the residual stress, initial gap height, and thickness on the pull-in voltage of the micro circular plate are systematically explored. Overall, the proposed method provides an accurate and versatile means of analyzing the complex nonlinear behavior of the electrostatically-actuated microstructures.
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