Characterization of the E to H transition in a pulsed inductively coupled plasma discharge with internal coil geometry: bi-stability and hysteresis

Abstract

Electrodeless radiofrequency discharges exhibit two modes of operation: a low-density mode in which the power is capacitively coupled to the plasma and which is known as the E-mode, and a higher density mode which is an inductive discharge known as the H-mode. The transition between these modes exhibits hysteresis, i.e. the E to H transition occurs at a different coil current than the reverse H to E transition. Recent theoretical results show that the hysteresis can be qualitatively understood in terms of electron power balance assuming that either the power dissipated or the power absorbed by the plasma electrons has a nonlinear dependence on the electron density. Experiments have been carried out to examine this hypothesis, both by characterizing steady-state E- and H-mode plasmas with a Langmuir probe, and by using a new approach consisting of measuring the internal plasma parameters in a pulsed discharge. In the latter case, the power is time modulated with increasing and decreasing power ramps. This approach allows us to investigate the hysteresis in detail and to study the dynamics of the transition. A number of time-resolved diagnostics including Langmuir probes, current and voltage sensors, optical emission and B-dot probes have been used.