Characterization of surface structures by using interferometry under challenging environmental conditions

Abstract

Surface data contains not only information about functionality of a product but also gives hints about the environmental conditions, like processing parameters or vibration. There are different methods to obtain such information and white light interferometers are accepted to be one of the most powerful tools for surface metrology. Besides other metrological characteristics, its vertical resolution in the level of nanometer enables the acquisition of important details in topography. But at the same time, effects of environmental factors like uncontrolled movement or vibrations can be seen in the measurement data if some precautions are not taken. In this paper a new method which reduces the effects of environmental disturbances is described.