Abstract
Evidence of the strong contribution of electrons with energies up to the cathode fall potential was found in low-pressure He dc glow discharge plasmas (3–8 mTorr), in agreement with expectations from the estimates of the mean free path of electron–neutral inelastic collisions. A simple gridded probe, of the retarding field analyzer type, was applied to the characterization of the full electron energy distribution function (EEDF) in He plasmas with significant contribution from suprathermal electrons (up to 3.5%). The inferred EEDFs were cross-checked with results from the He line ratio diagnostic and good agreement was found at several values of pressure and plasma current.
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