Abstract
The stacking faults (SFs) in 4H-SiC epilayers have been characterized by microphotoluminescence spectroscopy and photoluminescence (PL) intensity mapping at room temperature. Three kinds of SFs, intrinsic Frank SFs, double Shockley SFs, and in-grown SFs, have been identified in the samples. Each kind of SF shows the distinct PL emission located at 420, 500, and 455nm, respectively. The shapes and distributions of SFs have been profiled by micro-PL intensity mapping. The formation mechanisms of each SF are also discussed.
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