Abstract
Chemical structure, microstructure and properties of organically modified silicate (ORMOSIL) antireflective (AR) coatings from phenyltriethoxysilane (PTES) and tetraethoxysilane (TEOS) were characterized. The reaction between PTES and TEOS was verified by means of FTIR, XPS, and 29Si NMR. N2 adsorption-desorption analysis and TEM were utilized to investigate the pore structure and microstructure control of ORMOSIL AR coatings. It was revealed that, by increasing PTES/TEOS molar ratio, the porosity of ORMOSIL AR coating decreased and then the refractive index increased gradually from 1.21 to 1.27. The hydrophobicity of ORMOSIL AR coatings was also improved significantly by increasing the water contact angle from 21.2° to 112°. Most importantly, the OIH mechanism between PTES and TEOS and hence the microstructure control of ORMOSIL AR coatings were induced in detail based on a deep discussion of results from 29Si MAS NMR, N2 adsorption-desorption analysis and TEM characterization. Finally, the feasibility of application of PTES/TEOS ORMOSIL thin films in preparation of double-layer broadband AR coatings was verified.
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