Abstract

The effect of excimer laser radiation to silicon nitride ceramic surface morphology was investigated. The response of the surface at irradiation to different laser fluences and in-vacuo measurements of the particle emission due to laser irradiation were examined. The irradiated surface showed pillar-like features at low fluence (20kJ/m2), however, flat surfaces were produced at high fluence (100kJ/m2). Quadrupole mass spectrometry during laser irradiation showed that the emitted particles were Si+, Y+, O and N. It is thought that the surface silicon nitride and/or grain boundary crystal phase (Si3N4⋅Y2O3) was decomposed during laser irradiation, and the resulting Si+ to form SiO2 layers and/or pillars on the surface. These surface features degrated the strength of the specimens due to pore formation just under the surface.

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