Characterization of probe lasers for thin-film optical measurements

Abstract

The peak-power-density stability and beam-wander precision of a probe laser are important factors affecting the inspection results in precise thin-film optical measurements. These factors are also key to evaluating a probe laser for in-line long-time operation of precise thin-film optical measurements. The peak-power density and beam wander of liner helium–neon (He–Ne) lasers, random He–Ne lasers, and diode lasers as functions of time are investigated experimentally using a beam profiler. It is found that the linear polarized He–Ne laser is considered to be a promising candidate for a probe laser employed in precise thin-film optical measurements due to better peak-power-density stability and beam-wander precision. Both the peak-power-density stability and beam-wander precision of He–Ne lasers are usually better than that of diode lasers, but an adequate warm-up of He–Ne laser for 30 min is required before thin-film optical measurements are made. After 12 h operation, the linear polarized He–Ne laser is suitable for precise thin-film optical measurements because both the peak-power-density stability and the beam-wander precision reach the minimum level. A cost-effective system composed of two linear polarized He–Ne lasers for long-term operation is proposed. This system can operate for around 0.5–1.2 years in precise thin-film optical measurements under the normal operating life of a He–Ne laser by switching the probe laser every 18 h.