Abstract
Porous silicon nitride/silicon oxynitride composite ceramics were fabricated by silica sol infiltration of aqueous gelcasting prefabricated Si 3N 4 green compact. Silica was introduced by infiltration to increase the green density of specimens, so suitable properties with low shrinkage of ceramics were achieved during sintering at low temperature. Si 2N 2O was formed through reaction between Si 3N 4 and silica sol at a temperature above 1550 °C. Si 3N 4/Si 2N 2O composite ceramics with a low linear shrinkage of 1.3–5.7%, a superior strength of 95–180 MPa and a moderate dielectric constant of 4.0–5.0 (at 21–39 GHz) were obtained by varying infiltration cycle and sintering temperature.
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