Abstract

The effect of pore former content on both porosity and pore structure was investigated for porous sintered reaction-bonded silicon nitrides (SRBSNs). A spherical PMMA with d 50 =8 μm was employed as a pore-former. Its amount ranged from 0 to 30 part. Porous SRBSNs were fabricated by post-sintering at various temperatures where the porosity was controlled at 12~52%. The strong tendency of increasing porosity with PMMA content and decreasing porosity with sintering temperature was observed. Measured pore-channel diameter increased (0.3→1.1 μm) with both PMMA content and sintering temperature.

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