Abstract
In the present work white light interferometry is applied for the characterization of polymer films commonly used in bimorph chemical sensors. The study focuses on methacrylate polymers with positive tone patterning capabilities. The behavior upon exposure to controlled concentrations volatile organic compound and water vapors of thin poly (hydroxy ethyl methacrylate) (PHEMA) and poly (methyl methacrylate) (PMMA) layers was evaluated. The normalized film expansion for PHEMA, compared to PMMA, is higher in the case of water and methanol vapors, almost equal for ethanol and significantly lower in the case of acetone. This behavior could be attributed to the combination of polarity and hydrogen bonding capability of the analytes. A wide polymer film thickness range was examined and it was revealed that the normalized film expansion in both PHEMA and PMMA is nearly constant for films thicker than 100 nm and increases for thinner films.
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