Abstract
Characterization results of thin-film poly(phenylsilsesquioxane) (PPSQ) planar-optical waveguides are presented. Results of absorption spectrum, refractive index, thermal stress effect, and waveguide loss measurements performed on 1-2 /spl mu/m PPSQ films indicate this silicon backbone polymer to be a strong potential candidate for optical waveguide integration within microelectronic systems. PPSQ films are shown to exhibit thermal stability with respect to volume, refractive index, and optical loss for temperatures up to 400/spl deg/C. The first TE mode of PPSQ planar optical waveguides between 1.32 and 1.72 /spl mu/m in thickness fabricated on 5-/spl mu/m HiPOX Si wafers exhibited optical loss of 0.16 dB/cm at 632.8 mn.
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