Abstract
Excitation of m=0 standing helicon waves (SHWs) of N=1 and 3 modes (m is the azimuthal mode number and N is the number of half-wavelengths in the axial direction) and production of high-density plasmas of the order of np≃1013 cm3 have been investigated in a short cylindrical plasma column of 10 cm length [M. Nisoa, Y. Sakawa and T. Shoji: Jpn. J. Appl. Phys. 38 (1999) L777]. Excitation of different N modes of SHWs has caused an abrupt density jump with rf power Prf and axial static magnetic field B0. The power-balance equation is solved using the np dependence of plasma loading resistance R obtained numerically from a two-dimensional wave code. Calculated Prf and B0 dependence of stable np agrees well with measured ones. Measured hollow (parabolic) np profile caused by the excitation of N=1 (N=3, 5 and travelling helicon wave) mode is explained in terms of the perpendicular (parallel) component of wave electric field E⊥ (Ez). Power absorption due to E⊥ and Ez is dominant for the hollow and parabolic np profiles, respectively.
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