Abstract
The luminosity of the Large Hadron Collider (LHC) at CERN will be upgraded to 7.5e34 $\rm{cm^{-2}s^{-1}}$. The increased luminosity leads to an increased particle fluence and ionizing dose in the detectors. The tracking detectors of the CMS experiment will be upgraded in order to cope with the new operating conditions. Prototype hybrid pixels sensors for the CMS Inner Tracker upgrade with rectangular $\rm{100 \times 25}$ $\rm{\mu m}$ pixels produced by three different manufacturers and readout by the RD53A chip were characterized before and after irradiation to fluences up to $\Phi_{\rm eq} =$ $\rm{2.0e16}$ $\rm{cm^{-2}}$. The characterization results presented in this paper demonstrate that all sensors meet the requirements for operation at the high-luminosity LHC.
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