Abstract
We report on the focusing performance of reflective 2D high contrast grating lenses based on silicon. The combination of their subwavelength nature and their high refractive index contrast make it possible to create highly tolerant and planar microlenses. We used a rigorous mathematical code to design the lenses and verified their performance with finite element simulations. We also investigated the effects of grating thickness, angle and wavelength of incidence in these simulations. Experimentally, we show the evolution of the beam profile along the optical axis for a lens with a high (0.37) numerical aperture. We have explored a wide range of numerical apertures (0.1 – 0.93) and focal lengths (5 μm – 140 μm) and show that the lenses behave as expected across the full range. Our analyses demonstrate the large design flexibility with which these lenses can be made along with ease of fabrication and potential for a number of applications in micro-optics.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
