Abstract

In this paper, studies on the characterization of pellicle membranes with a lab-based spectroscopic reflectometer operated in the extreme ultraviolet (EUV) spectral range from 8.7 nm to 15 nm are presented. This includes the actinic wavelength of EUV lithography at 13.5 nm for high volume manufacturing as well as its neighboring spectral bands. The tool can perform spectroscopic measurements of reflectance under adjustable incidence angles of grazing illumination, ranging from 5° to 12°. Additionally, spectroscopic measurements of transmittance under normal incidence for thin membranes l 100 nm can be performed. By acquisition of a data set of transmittance and reflectance values, membranes are characterized with respect to their optical constants and their dimensional parameters such as thickness and roughness by means of reconstruction. From reconstructed optical constants further properties such as density and stoichiometry can be derived.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.