Abstract
This paper proposes the characterization of 8–10GHz inline-type radio frequency microelectromechanical systems (RF MEMS) power sensors on the packaging-test-fixture for power self-detection systems in RF receivers and transmitters. The sensors are used to convert a certain percentage of the RF power coupled by a MEMS membrane into thermovoltages based on Seebeck effect. Two packaging methods are studied to evaluate the RF performance by the simulation and the measurement. The effects of the temperature from 5°C to 75°C on the packaged power sensors are quantified by the measurement of the output thermovoltages, which result in the 33.2% change in sensitivity at 10GHz. After the packaging, rise and fall response times of <10ms are obtained. In addition, measured mechanical resonance frequency (f1st) of the MEMS membrane in the sensors is 78kHz. Experiments show that the single-sideband phase noise of the packaged power sensors is as low as −122dBc/Hz at the offset frequency Δf=500kHz for an input RF signal of 100mW and 9GHz, and the sensors do not generate any significant phase noise in the interested RF range.
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