Abstract
Esterification of 4-hydroxyphenylacetic acid with various alcohols of (+)-borneol, (±)-borneol and ethylene glycol monobutyl ether were carried out. The ester compounds were then copolymerized with various comonomers of bisphenol-A, phenol and formaldehyde. Physical properties and molecular structures of such synthesized phenolic resins were investigated by using IR, NMR, DSC, and TGA. To introduce carboxyl groups onto the side chain of the polymers, they were further functionalized with succinic anhydride. Copolymers containing pendant carboxyl groups synthesized in this investigation could be used as a negative tone photoresist. The photoresist was comprised of alkali soluble polymer with pendant carboxyl groups and photoacid generator. From the exposure characteristic curves, the exposure energy of the photoresist appeared in a range of about 200∼1000 mJ/cm2. It was found that adding a small amount of oxalic acid and ethylene glycol as crosslinking agents will increase the efficiency of crosslinking. In this case, the exposure energy was decreased to below 100 mJ/cm2. We investigated the thermogravimetric properties of binder resin, exposure characteristics, sensitivity and the resolution of photoresists. We also investigated the effects of exposure conditions and the concentration of crosslinking agents on the exposure characteristics of photoresists.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
