Abstract
The use of multilayer structures for soft x-ray spectroscopy requires an accurate knowledge of their reflection properties. In this paper, measurements and calculations will be presented for the single crystal integral reflection coefficients of several multilayer structures. Experimental results will be presented for wavelengths from about 0.8 to 1.4 nm. The measured integral reflection coefficients were smaller than those calculated for a perfect multilayer structure, in agreement with previous results. This reduction of diffraction efficiency is due to imperfections in the multilayer structure. Introduction of appropriate defect structure into the computational methods will be discussed. Evidence will be presented that the effect of substrate roughness is dominant.
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