Abstract
La 2Zr 2O 7 (LZO) buffer layers derived by metal organic deposition (MOD) were epitaxially grown on cube textured Ni5W substrates modified with an island-distributed LZO seed layer, and electron backscattered diffraction (EBSD) was employed to characterize the crystallographic relationship of the {0 0 1}〈1 1 0〉 rotated cube textured LZO grains with respect to the {0 0 1}〈1 0 0〉 cube textured Ni5W substrate. The uniformly distributed, islanded seed layer can effectively optimize the orientation of the double-layered LZO films, as proved by X-ray diffraction and EBSD analyses. It is concluded that the accelerating voltage is crucial for determinating the crystallographic orientation of the multilayer sample. Information about the epi-layer and the substrate was obtained at different accelerating voltages, which revealed, in particular, a superposed pattern of both layers.
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