Abstract
An awe-inspiring mirror used for centuries in religions of the Far East has been polished and brushed up to become a powerful scientific tool. This “magic mirror”, very simple and non-destructive, transforms latent damage, scratches, waviness and other flaws on mirror-like surfaces into visual images using the “Makyoh” principle. The technique detects undulations of a few nm over a distance of about 0.5 mm. It has recently been used to characterize highly finished mirror-polished large diameter Si wafers for ULSI applications, replacing the laborious and unstable naked eye wafer inspection lines. Our studies have shown that the technique is also very useful for monitoring surface sensitive IC processes such as epitaxy, chemical vapor deposition, rapid thermal process, ion implantation, etc.
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