Characterization of microstructure and interfaces in TiCTiB 2 coatings

Abstract

TiC and TiB 2 single-layer coatings and TiCTiB 2 multilayer coatings including 10, 100 and 1000 individual layers with a total thickness of 5 μm were prepared by magnetron sputtering. The mechanical properties and X-ray diffraction patterns of the multilayer coatings show a clear dependence on the number of phase transitions. In contrast to former investigations with Auger electron spectroscopy, no interface zones between TiC and TiB 2 layers could be seen in the transmission electron microscope (TEM). TEM examinations of single-layer coatings indicate a change of texture with distance from the substrate-coating interface. In multilayer coatings a similar change of texture can be found resulting in additional interfaces and could thus be the reason for the change in properties and X-ray diffraction patterns.