Abstract
Laser micromachining technique was used in this work to produce two different microfluidic structure on three MEMS materials namely silicon, SU-8 photoresist and polydimethylsiloxane (PDMS). The operational parameters of the machine ablation effects on the materials, which are the laser energy, laser pulse rate and the laser size were also investigated. We found that this technique is capable to produce typical MEMS structure similar as being produced using conventional photolithography process.
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