Abstract
ABSTRACTThe localized density of states (LDOS) at interfaces between intrinsic silicon and silicon nitride (Si3N4 films are studied using transient voltage spectroscopy (TVS). In the TVS technique, the transient of the voltage across a MIS-diode after a trap filling voltage pulse is measured using a high-impedance voltage probe. This allows us to make a precise measurement of the LDOS at undoped Si/insulator interfaces. The LDOS in a-Si:H/Si3N4systems has a broad peak around the energy of 0.9 eV below the conduction-band edge. A modification of the LDOS at a-Si:H/Si3N4 interfaces by bias-annealing is clearly observed using this technique. The results are consistent with the defect pool model. The LDOS in laser annealed poly-Si/Si3N4 systems has a peak centered 0.6eV below the conduction-band edge, which seems to be the Si dangling bond states in the poly-Si films.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
