Abstract
LiNbO3 waveguides are fabricated most commonly by two methods, Ti-indiffusion or Li2O-outdiffusion. The disadvantages of these two methods are: (1) Ti-indiffused waveguides have low optical damage threshold and it is not possible to obtain Ti-indiffused waveguides with a mode depth less than 2 μm; and (2) waveguides obtained by Li2O-outdiffusion at high temperatures have an even larger mode depth (~ 5 μm). The use of ion exchange to make LiNbO3 waveguides with large Δn and high optical damage threshold has been reported previously by Shah (1) and by Jackel (2). Single mode LiNbO3 waveguides with small mode depth, low attenuation high optical damage threshold and low in-plane scattering noise are very important to integrated optical signal processing applications.
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