Abstract
Thin layers of mixed iridium-tin oxides, deposited on Ti foils, were studied by inductively coupled plasma emission spectroscopy (ICPES) and a number of surface sensitive spectroscopies and microscopies in order to characterize both the overall composition of the layers and their surface state. The ICPES analysis allowed a determination of the average content of Ir and Sn in the bulk. The surface analysis performed by means of X-ray photoelectron spectroscopy revealed the existence of IrO 2 and SnO 2 in the layers while scanning Auger microprobe showed distinct surface enrichment with Ir. In the near surface region, up to ∼ 700 nm in depth, the Ir content detected with Rutherford backscattering spectroscopy and energy dispersive X-ray spectroscopy was 20–40% higher than in the bulk. Reasons for the non-homogeneity in the distribution of IrO 2 and SnO 2 in the films are discussed.
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