Abstract

This work presents the characterization of integrated inductors on a flexible substrate, fabricated through simple and original technology. Kapton was used as the flexible substrate with gold metallization and silicon dioxide as the dielectric. Several inductors were fabricated with a different number of turns, line widths, line spacing, internal diameters, and geometries to verify the influence of such different configurations on the inductor's performance. It was possible to obtain inductors compatible with voltage-controlled oscillators design and other radio frequency and microwave circuits, enabling the advancement of heterogeneous integration.

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