Abstract

A microstructure of a barrier-layer capacitor with Bi2O3 diffused SrTiO3 has been studied by means of SEM, TEM, and XPS. Samples for SEM observations were prepared by electrolytic etching, which allowed a visual characterization of insulating boundary layers. They were O2-diffused layers wider than Bi-diffused layers, which observed as lattice-disorder region by TEM. Metal Bi was observed in addition to Bi2O3 by XPS. Barrier-layer model unique in case of Bi2O3 was investigated for oxygen supplyment from Bi. And we revealed it's propriety using standard free energy of metal oxide.

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