Characterization of Indium Tin Oxide (ITO) Thin Film Fabricated by Indium-Tin-Organic Sol Including ITO Nanoparticle

Abstract

In this paper, indium tin oxide (ITO) thin film was fabricated by indium-tin- organic sol including ITO nanoparticle, and optical transmittance was characterized.. ITO nanoparticle was designed to dope 10wt% SnO 2 into In 2 O 3 lattice, and was synthesized under low temperature not exceeding 300°C in order to make ultrafine sized particle. As a result, the synthesized ITO nanoparticle showed ultrafine size about 5 nm and high specific surface area of 117 m 2 /g.. Also, (222) preferred orientation was observed from X-ray diffracted peak. Then, using the particles and indium-tin-organic sol, ITO thin film was fabricated. The indium-tin-organic sol was made using organic solution in which indium and tin acetic reagents were dissolved into an organic solvent. The ITO nanoparticle was included into indium-tin-organic sol in order to deposit ITO sol thin film by spin coating. The ITO mixture sol was spin-coated on a glass substrate of which area was 7x 7 cm, and heat-treated at 500°C. As a result, the optimized ITO sol-gel thin film could be successfully fabricated with good optical transmittance over 83% and electrical resistance less than 7 x 10 3 Q by including the 0.6wt% ITO nanoparticle into the ITO sol..