Abstract
Silver-rich GeTe solid electrolytes for use in programmable metallization cell (PMC) memory devices were prepared by the in situ diffusion of silver into the GeTe films during the deposition of silver by rf sputtering on GeTe chalcogenide glass films. The concentration of silver in the silver-rich GeTe films was controlled by adjusting the concentration of Te in the GeTe films. A PMC memory device with a Ag(300nm)∕Agx(Ge45Te55)1−x(200nm)∕TiW(100nm) structure and a device diameter of 0.5μm showed reproducible memory characteristics based on resistive switching at low voltage with high Roff∕Ron ratios. The PMC memory device exhibited good switching characteristics up to 100cycles at an amplitude of ±2V and a pulse width of 1μs.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callSimilar Papers
More From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
