Characterization of hole circularity and heat affected zone in pulsed CO2 laser drilling of alumina ceramics

Abstract

Circularity of drilled hole at the entry and exit, heat affected zone and taper are important attributes which influence the quality of a drilled hole in laser drilling. This paper examines the effect of laser parameters on the quality of drilled holes in Alumina ceramics which are widely used in microelectronic devices, based on orthogonal array experimentation and response surface methodology. Both entrance and exit circularities were significantly influenced by hole diameter and laser power. Heat affected zone was influenced by frequency. Taper was also significantly influenced by laser power. Response surface model predicted nominal entrance circularity at 2.5kHz, 240W, 2.5mm/s, 1mm hole, exit circularity and taper at 7.5kHz, 240W, 4.5mm/s, and 1mm hole. The model predicted lowest heat affected zone at 7.5kHz, 240W, 2.5mm/s, and 1mm. Multiobjective optimization achieved using both response surface model and gray relational analysis indicated that all the four quality parameters are optimized at 7.5kHz, 240W, 3.85mm/s and 1mm.