Abstract
The application of a tuned Langmuir probe is extended to the measurement of the charged particle characteristics (electron and ion number density, average electron energy and electron temperature) in an analytical radiofrequency glow discharge (RF-GD) in helium. The effects of discharge operating conditions, such as RF power and pressure, on the charged particle characteristics for conducting (aluminum) and nonconducting (Macor) samples are studied. The differences in plasma characteristics between argon and helium working gases are discussed. Langmuir probe measurements are also performed in an argon/helium mixture. Variations of the emission intensities of sputtered analytes (copper and aluminum) are investigated when helium is introduced into an argon RF glow discharge plasma. It is recognized that, although the number of sample atoms in the plasma gradually decreases due to reduced sputtering, the emission intensities of various Al(I) and Cu(I) lines increase with helium addition. Measured electron and ion number densities also decrease with helium addition, whereas the average electron energy and electron temperature increase, accounting for the enhancement of emission intensities.
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