Abstract

Two types of silicon carbides (single and polycrystals) irradiated by H + 2 ions (50 kV) were characterized using RBS, ERDA, XPS and ESR methods. The formation of an oriented second phase in single-crystal SiC was suggested by XRD measurements. It is found that hydrogen atoms implanted into a SiC lattice form CH bonds and the states of these CH bonds seem to be somewhat different from the ordinary CH bond.

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