Abstract
This report documents a study completed on the fiber optic probe system that is a part of the Werth optical CMM. This study was necessary due to a lack of documentation from the vendor for the proper use and calibration of the fiber probe, and was performed in support of the Lithographie Galvanoformung Abformung (LIGA) development program at the FM&T. As a result of this study, a better understanding of the fiber optic probe has been developed, including guidelines for its proper use and calibration.
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