Abstract
Cathodoluminescence and ion beam induced luminescence measurements were performed on Er2O3 coatings fabricated by the Metal Organic Chemical Vapor Deposition (MOCVD), Metal Organic Decomposition (MOD) and RF sputtering methods to examine relations between luminescence spectra and their crystallinities. In luminescence spectra of all the measurements, peaks were observed in three bands of 380–420nm, 530–580nm and 640–690nm. Cathodoluminescence intensities in the band of 640–690nm increased with substrate temperatures in the fabrication processes and are considered to be significantly sensitive to the crystallinity. Change in luminescence spectra under ion beam irradiations also supported the relation. By using the relations between the spectra and crystallinities, luminescence measurements would be effective for nondestructive inspection and analysis of Er2O3 coatings with a high spatial resolution.
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