Abstract
Embedded planarized inductors can be fabricated using the low-temperature co-fired ceramic technique. Larger inductance is obtained when using a spiral pattern, because the mutual inductance between adjacent conductors has a positive sign. In addition, because of their simple geometry and easy fabrication, spiral-type inductors are widely used. For embedded five- and ten-turn spiral coils, the inductances of about 0.3 and 1.2 µH were obtained, respectively. The value of inductance was almost unchanged in the frequency range between 500 kHz and 40 MHz. The quality factor reaches a peak with increasing frequency and then falls. The peak values (about 10 MHz) of the five- and ten-turn spiral coils are about 20 and 32, respectively.
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