Abstract
In this work we determine the critical flow parameters for three diamond sonic micronozzles and one microtube fabricated to work as passive gas flow controllers and flowmeters under choking conditions. The critical mass flow rate, the Reynolds numbers and the discharge coefficients of our diamond sonic microdevices were determined at low-pressure conditions.
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Schedule a callMore From: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
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