Abstract

A brief survey of a few selected methods for the characterization of surface defects on oxides will be given. Reference will be made to the degree of non-stoichiometry, which can be analysed, for example, by High resolution Electron Energy Loss Spectroscopy (HREELS) and electrical conductivity measurements. Point defects like oxygen vacancies are detected by Atomic Beam Scattering (ABS) and possibly by Scanning Tunneling Microscopy (STM). Sputter induced changes are favourably characterized by Photoelectron Spectroscopy of adsorbed Xenon (PAX) and by adsorption/desorption experiments.

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